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Country:

Taiwan

Model No:

SGA-310B

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Contact Person CM

Ming-Syong, Chia-Yi, Other

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Product Specification

  • Electric heater type gas abatement system.:Perfect abatement efficiency for flammable &water solubl
  • Minimizing moisture vapor exhaust (Apply dry system):Excellent safety interlock system
  • Longer maintains cycle .Simple operation and easy maint:Relatively lower operation cost(Heater easy to PM)

Product Description

 

Low running cost   Uses only electricity and water, therefore it is easy tomanage, making it possible to reduce running cost dramatically. 
Install anywhere, including a clean room   deposition gas with a comparably low decompositiontemperature. IPI series standard model:Auto purifying function is a standard feature.Easymaintenance   Wet-Thermal-wet SGA***0A Wet-Thermal-wet SGA***0BS Wet-Thermal-wet SGA***0BT

 

Country: Taiwan
Model No: SGA-310B
FOB Price: Get Latest Price
Place of Origin: -
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CM < IPI Integrated Plasma Inc. >

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